Abstract:Taking the KEITHLEY 6517 electrostatic meter as measurement standard, using the standard meter method, the accurate and reliable verification to the DC low current reference source could be realized. The accurate evaluation of the uncertainty indicated that the verification of the DC low current reference source with the maximum permissible error of ± 0.5% and below could be achieved. This greatly increased the ability of quantity value dissemination to the DC low current reference source.