A 5-bit distributed Micro Electro Mechanical System(MEMS) phase shifter is designed. Based on the analysis of two different loading DC bias ways of traditional distributed MEMS phase shifter, a new loading DC bias method is put forward to resolve the problems in traditional way. The new method with simple process can separate AC and DC and avoid the complexity of wiring. Phase shifter’s microwave performance parameters are obtained and optimized through software ADS. Simulation results show that the phase shifter’s phase error is less than 3°, the insertion loss less than 0.5 dB, and the return loss more than 23 dB at 35 GHz. The performance has met the requirements. The process flow of five-bit distributed MEMS phase shifter is introduced, the advantages of simple process for the new loading DC bias method is verified.