For the developmental tendency of pulsed power technology is compact and solid-state, a solid-state pulsed power technology based on GaAs Photoconductive Semiconductor Switches(PCSS) and ceramic planar transmission lines is proposed. The critical components and technologies included are solid-state ceramic planar transmission lines, high-power GaAs PCSS and triggering system of laser diode. An experiment of single Blumlein pulse forming line is conducted, of which the output characteristics is studied, and filament current damage of GaAs PCSS working at the lock-on mode is analyzed. Experimental results show that the proposed compact pulsed power system which obtained a high voltage pulse output above 20 kV on the load is feasible.