Abstract:The characteristic vibration mode of many sugars and biological macromolecules are just located in the range of THz, therefore THz frequency range shows the potential to act as a tool of sensing biochemistry samples. Water plays an important role in the function of biological molecules, nevertheless it is hard to get terahertz transmission of liquids due to the significant THz absorption by water. A terahertz microfluidic chip made of quartz and Polydimethylsiloxane(PDMS) is designed. The quartz acts as a substrate, on which a microfluidic channel with a height of 50 μm is etched by lithography technology. PDMS acts as a membrane, which is bonded with quartz substrate, then punched. The transmittance of the chip, absorption spectra and refractive index of water are measured, respectively. The results match well to what have published that there is no obvious peak but a monotonic increase in the absorption coefficient from 0.2 THz to 1 THz when the transmittance is higher than 30%. This microfluidic chip can be used for terahertz spectrum measurement of liquid in the range of 0.2 THz-1 THz and realize real-time and label-free sensing for biochemistry samples in small volume liquid.