Terahertz wave is the natural extension of the electromagnetic wave from the millimeter-wave to the higher band. Extraordinary physical properties are exhibited in this band, which makes the breakthrough advance of the resolution and the image frame of terahertz Synthetic Aperture Radar(SAR) possible. Much attention has been attracted to the research of the terahertz SAR. There are many differences between the terahertz SAR and the traditional SAR, one of the most important difference is the treatment on the motion compensation. Because of the wavelength of the Terahertz SAR is much shorter than that of traditional microwave, the compensation of the tiny vibration of the platform which can be ignored at the traditional SAR should be treated precisely. The motion compensation method of the traditional SAR is reviewed briefly. The impacts of all kinds of motion error are included, and the impact of the high frequency vibration is analyzed in detail. A motion compensation method is proposed according to the imaging method of the vibration targets. The numerical tests validate the proposed method.