Au films sputtered at different sputtering powers on ZnO surfaces are deposited. The effects of different sputtering powers on the deposition rates, crystal quality and bonding force between Au and ZnO film are researched. Au films at sputtering power of 100 W features the best performance compared with that at other sputtering powers. The influences of different sputtering powers on the resistances of ZnO membranes are studied as well. The results show that the higher the sputtering power, the more likely the ZnO resistance is broken-down; and an Au film at the sputtering power of 100 W shows the smallest influence on ZnO resistance.