Comparing the failure fixed methods and flexible methods in current national military standard, under the same condition, the magnitude difference of two methods results the confusion in actual applications. For the semiconductor discrete devices, electronic and electrical components and microelectronic devices which share the same volume cavity, there still exist bigger differences among their criteria of fine leak because of different styles, packages and processes. The standard criteria for fine leak in American military standard are analyzed. It is pointed out that there is still something not applicable in two standards. The standard criteria for helium mass spectrometer leak detection should be further improved.