基于硅基微结构高性能太赫兹波电控调制器
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国家自然科学基金资助项目(51572042);国家国际科技合作专项资助项目(2015DFR50870);国家科学挑战计划资助项目(TZ2018003);四川省科技支撑资助项目(2014GZ0091;2015GZ0069;2014GZ0003)

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High performance electrically modulators based on silicon microstructure with VO2 films for terahertz applications
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    摘要:

    通过硅基微结构与二氧化钒(VO2)相变薄膜相结合,设计并实现了一种电控太赫兹幅度调制器件。该调制器具有很高的太赫兹波透射率与极低的器件插损,同时具有大的工作带宽和调制深度。仿真和实验测试结果表明,该调制器对太赫兹波的增透响应带宽为0.25~0.95 THz波段。在0.4~0.85 THz频段内(约450 GHz宽带)的透射率超过80%,相较于硅衬底的透射率增加了10%以上,且透射率最高可达85%。对该器件电调控后,调制深度可达76%以上,器件透射率变化幅度可达65%。因低插损、大调制幅度以及宽工作带宽,该太赫兹调制器在太赫兹成像和通信系统中具有重要的应用价值。

    Abstract:

    An electronically controlled terahertz amplitude modulation device is designed and implemented by integrating silicon-based microstructure with vanadium dioxide phase-change film. This device has a high transmittance of terahertz waves and very low insertion loss of the device, while having a large operating bandwidth and modulation depth. Simulation and experimental results show that the modulator's response bandwidth for the increased transmission effect of terahertz waves is 0.25-0.95 THz. The transmission of the modulator is over 80% in the frequency range of 0.4-0.85 THz, and compared with the transmission of high resistance silicon wafer, it is increased by over 10%. And the transmittance of the modulator can be up to 85%. After the device is electrically controlled, the modulation depth can reach more than 76%,and the change range of the modulator's transmittance can reach 65%. An important application value of the THz modulator is demonstrated in terahertz imaging and communication system, because of its low insertion loss, large modulation amplitude and wide working bandwidth.

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代朋辉,唐亚华,杨青慧,张怀武,文岐业.基于硅基微结构高性能太赫兹波电控调制器[J].太赫兹科学与电子信息学报,2019,17(1):29~34

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  • 收稿日期:2018-02-03
  • 最后修改日期:2018-03-07
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  • 在线发布日期: 2019-03-27
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