超深亚微米SOI总剂量效应泄漏电流模型
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中科院西部之光资助项目(2015-XBQN-B-15;2017-XBQNXZ-B-008);国家自然科学基金项目(U1532261;11605282;11505282;11605283)

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Leakage current model of Total Ionizing Dose effect in ultra deep submicron SOI MOSFET devices
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    摘要:

    总剂量辐射效应会导致绝缘体上硅金属氧化物半导体场效应晶体管(SOI MOSFET)器件的阈值电压漂移、泄漏电流增大等退化特性。浅沟槽隔离(STI)漏电是器件退化的主要因素,会形成漏极到源极的寄生晶体管。针对130 nm部分耗尽(PD) SOI NMOSFET器件的总剂量辐射退化特性,建立了一个包含总剂量辐射效应的通用模拟电路仿真器(SPICE)模型。在BSIM SOI标准工艺集约模型的基础上,增加了STI寄生晶体管泄漏电流模型,并考虑了辐射陷阱电荷引起寄生晶体管的等效栅宽和栅氧厚度的变化。通过与不同漏压下、不同宽长比的器件退化特性的实验结果对比,该模型能够准确反映器件辐射前后的漏电流特性变化,为器件的抗辐射设计提供参考依据。

    Abstract:

    The total dose radiation effect will lead to the shifting of threshold voltage and increasing of leakage current of Silicon-On-Insulator Metal-Oxide Semiconductor Field Effect Transistors(SOI MOSFET) device. The increase of leakage current of Shallow Trench Isolation(STI) is the main factor of device degradation, which will form parasitic transistors from drain to source. In order to study the total dose radiation degradation characteristics of 130 nm Partially Depleted(PD) SOI MOSFET device, a Simulation Program with Integrated Circuit Emphasis(SPICE) model including total dose radiation effect is established by using Verilog-A language. Based on the BSIM SOI standard process model, the SPICE model of STI edge leakage current is added, and the variation of equivalent gate width and gate oxygen thickness caused by radiation trap charge is considered. By comparing with the degradation characteristics of devices with different aspect ratios under different leakage voltages, the model can accurately reflect the changes of current characteristics before and after radiation, and provide a reference for radiation resistance design of devices.

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席善学,郑齐文,崔江维,魏 莹,姚 帅,何承发,郭 旗,陆 妩.超深亚微米SOI总剂量效应泄漏电流模型[J].太赫兹科学与电子信息学报,2019,17(6):1107~1111

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  • 收稿日期:2018-08-27
  • 最后修改日期:2018-10-26
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  • 在线发布日期: 2020-01-08
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