太赫兹光谱诊断等离子体电子密度实验及模拟
作者:
作者单位:

大连理工大学 三束材料改性教育部重点实验室,辽宁 大连 116024

作者简介:

赵亚锐(1994-),男,在读博士研究生,研究方向为太赫兹光谱诊断.email:zhaoyarui@mail.dlut.edu.cn.
崔紫宵(1998-),女,在读硕士研究生,研究方向为激光等离子体诊断.
吴 鼎(1990-),男,博士,副教授,研究方向为激光光谱诊断. email:hding@dlut.edu.cn
冯春雷(1986-),男,博士,高级工程师,研究方向为激光光谱诊断.
丁洪斌(1963-),男,博士,教授,研究方向为激光光谱诊断.

通讯作者:

丁洪斌 (1963-),男,博士,教授,研究方向为激光光谱诊断 email:hding@dlut.edu.cn.

基金项目:

国家重点研发计划资助项目(2017YFE0301304);国家自然科学基金资助项目(12005034);中国博士后基金资助项目(2019M661087)

伦理声明:



Experimental and simulation of diagnosing plasma electron density by THz spectroscopy
Author:
Ethical statement:

Affiliation:

Key Laboratory of Materials Modification by Laser, Ion and Electron Beams,Chinese Ministry of Education,Dalian University of Technology,Dalian Liaoning 116024,China

Funding:

  • 摘要
  • |
  • 图/表
  • |
  • 访问统计
  • |
  • 参考文献
  • |
  • 相似文献
  • |
  • 引证文献
  • |
  • 资源附件
    摘要:

    近年来,太赫兹时域光谱技术(THz-TDS)被用于多种等离子体源的电子密度诊断研究中,但其可靠性程度评估工作开展较少,亟需补齐相应研究。本文将THz-TDS用于诊断电感耦合等离子体源(ICP)的电子密度,ICP驱动频率为13.56 MHz,功率为250~400 W,工作介质为氩气,气压为30~99 Pa。诊断结果显示电子密度随输入功率和气压单调递增,电子密度范围为1013~1014 cm-3。同时,利用COMSOL Multiphysics构建漂移扩散模型对该条件下等离子体电子密度进行数值计算研究。结果显示:实验测量与数值计算的电子密度值定量吻合较好,且两者随气压变化趋势一致。证实了THz-TDS应用到等离子体诊断领域中具有可靠性高、稳定性好等优异特性,具有非常广阔的发展潜力。

    Abstract:

    Recently, Terahertz Time Domain Spectroscopy(THz-TDS) has been proposed to measure electron density of plasma. Nevertheless, the method still needs to be further verified by estimating the reliability and practicability using theoretic or other experimental methods. In this work, the THz-TDS technique is applied to measure the electron density of Inductively Coupled Plasma(ICP). The ICP discharge is operated in the H-mode with a RF power supply of 13.56 MHz at various input powers from 250 W to 400 W under argon pressures from 39 Pa to 99 Pa. It is observed that electron densities monotonically increase with the increase of RF input power and argon pressures, and the measured electron densities are in the range of 1013~1014 cm-3 under the given conditions. Meanwhile, a fluid numerical simulation based on COMSOL Multiphysics using drift-diffusion model is adopted to investigate the characteristics of the discharge plasma at the given powers and pressures. The results show that the simulated electron densities are in qualitative agreement with the measured results, which supports that the measurement method using THz-TDS is feasible. Furthermore, the variation trends of the electron density with the pressures obtained by simulation and measurement are also similar, which further verifies the application potential of the THz-TDS for non-invasive plasma electron density measurement.

    参考文献
    相似文献
    引证文献
引用本文

赵亚锐,崔紫宵,吴鼎,冯春雷,丁洪斌.太赫兹光谱诊断等离子体电子密度实验及模拟[J].太赫兹科学与电子信息学报,2022,20(8):804~809

复制
分享
文章指标
  • 点击次数:
  • 下载次数:
  • HTML阅读次数:
历史
  • 收稿日期:2022-02-12
  • 最后修改日期:2022-03-14
  • 录用日期:
  • 在线发布日期: 2022-08-23
  • 出版日期: