The rapid development and evolution of civilian and defense electronic information technology, such as wireless communication, detection and sensing, security inspection, and artificial intelligence, have increasingly urgent application demands for terahertz(0.1~1 THz) technology. The terahertz band has rich spectrum bandwidth resources, and its broadband characteristics can support the implementation of future 6G high-speed communication and new generation high-resolution radar system performance. At the same time, terahertz communication and detection must overcome the high propagation path attenuation and surge of passive devices and interconnect losses, as well as the power generation and efficiency problems of active devices brought about by high frequency and short wavelength. In this paper, the development status of terahertz RF devices and integration technology are reviewed, and the research progress of the Shanghai Jiao Tong University team in overall improving the performance of terahertz front-end systems through new passive and active devices, antennas, advanced packaging, and other technical methods are elucidated.