%0 Journal Article %T 原子制造与原子微系统:A2P与强约束集成微系统技术的结合 %T Atom assembly and atom microsystem:a blend of A2P and strongly constrained integrated microsystem %A 李 沫 %A 李 倩 %A 张 健 %A LI,Mo %A LI,Qian %A ZHANG,Jian %J 太赫兹科学与电子信息学报 %J Journal of Terahertz Science and Electronic Information %@ 2095-4980 %V 14 %N 5 %D 2016 %P 793-799 %K 从原子到产品;强约束集成微系统;微观架构;原子制造;原子微系统 %K Atoms to Product;Strongly Constrained Integrated Microsystem;micro architecture;atom assembly;atom microsystem %X 介绍了国外从原子到产品(A2P)研究,阐述了强约束集成微系统技术的微观架构及其两“微”内涵。在此基础上,将A2P与强约束集成微系统理念相结合,提出了原子制造和原子微系统概念,并初步分析了其科学技术框架体系。我们认为,原子制造和原子微系统技术是从“材料到系统”的集成微系统技术向原子层次的进一步延伸和发展,主要包含如下内涵:a) 研究如何开发先进工艺,跨越原子尺度到宏观尺度的制造鸿沟,使得从原子出发集成定制的宏观尺度产品或系统能够保持优良的“原子级”特性;b) 研究原子层级微观特性在向宏观产品传递过程中的变化的物理过程,讨论如何实现原子层次优良特性的选择性保留以及新特性开发,进而实现系统更强功能及更高性能。原子制造和原子微系统技术具有很强的前沿性、颠覆性,有望为后摩尔定律时代提供一条全新的技术途径,引发一场新的重大技术革命。 %X Researches about Atoms to Product(A2P) are firstly introduced. Then the connotation of Strongly Constrained Integrated Microsystem(SCIMS) and its micro architecture are demonstrated. A new concept named atom assembly and atom microsystem is proposed based on these ideals, by blending the technological ideas of A2P and SCIMS. Its science & technology framework are analyzed preliminarily. It is believed that, atom assembly and atom microsystem is a further development and expansion deep into atom scale of SCIMS. It contains following principles and goals: first, to develop the technologies and processes to assemble nanoscale(atom scale) constituents into materials, components and systems that preserve distinctive nanoscale properties; second, to study the vanishing physical process of nanoscale properties when nanoscale constituents are manufactured at larger “product-scale” dimensions, and to exploit unique nanoscale characteristics which may benefit for “product-scale” systems with higher performance. The concept of atom assembly and atom microsystem is very frontier, challenging and subversive, which may provide a feasible approach for post Moore’s Law era and trigger a technological revolution. %R 10.11805/TKYDA201605.0793 %U http://www.iaeej.com/xxydzgc/home %1 JIS Version 3.0.0