@Article{2016793, title = {原子制造与原子微系统:A2P与强约束集成微系统技术的结合}, author = {李 沫,李 倩,张 健}, journal = {太赫兹科学与电子信息学报}, volume = {14}, number = {5}, pages = {793}, numpages = {7.0000}, year = {2016}, month = {10月}, doi = {10.11805/TKYDA201605.0793}, publisher = {} }