This paper presents a robust optimal model of Micro Electro Mechanical Systems(MEMS) gyroscope and its design procedure. The proposed method adopts the sensitivity analysis considering the worst-case tolerance instead of statistical information about uncertainties. The genetic algorithm with the advantage of global optimization is employed. Sensitivity analysis shows the robust design is less sensitive to errors. Monte Carlo analysis is also performed, whose result indicates 88.35% of samples are acceptable. The gyroscope is fabricated using bonding and deep etching bulk micromachining process.