Abstract:With the satellite applications from millimeter wave to Thz band, the disadvantages of conventional ceramic substrate in loss and the surface state have become very prominent. Quartz substrate will be the first choice of the microwave circuit board for space. Due to the characteristics of quartz substrate and the special requirements in high frequency applications, the microstrip circuit process engineering of quartz substrate is not yet mature in domestic country. The quartz material properties, technological process and key technologies are analyzed, and the essentials of circuit production technology that should be paid attention to are proposed as well as the solutions to the technology bottlenecks.