Due to its low cost and simple process, crystalline silicon solar cells occupy most of the market share of solar cells. However, such problems as broken-grid and cracks will inevitably occur in the production process, so the detection of solar cells is very important. Terahertz wave has unique advantages in non-destructive detection as a kind of electromagnetic wave with photonics and electronics characteristics. By using terahertz quantum cascade laser digital holographic imaging system, simulated solar cells metal grids, ruptured silicon wafers and substrates with different resistivity are tested. The results show that the terahertz holographic imaging technology has high application value in the field of solar cell detection.