Review of magnetic field sensors based on MEMS silicon resonators
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1.Beijing Xinfeng Aerospace Equipment Co.,Ltd. Beijing 100854,China;2.School of Electronic Science and;Engineering,University of Electronic Science and Technology of China,Chengdu Sichuan 611731,China

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    Abstract:

    With the advent of the intelligent era, magnetic field sensors have been widely used in mobile devices to provide users with services such as positioning and navigation. At present, the magnetic field sensors based on Hall effect and the magnetoresistive magnetic field sensors which rely on magnetic materials are two dominant technologies in the market. The advantages of the magnetic field sensors based on the Hall effect include low cost, no need for magnetic materials and fabrication compatibility with the Complementary Metal Oxide Semiconductor(CMOS) technology. The operating range of this kind of sensors typically is from 10 μT to 1 T, and the resolution can be improved by increasing the power consumption. Magnetoresistive magnetic field sensors have high resolution and wide operating range(0.1 nT~1 T), and their performances mainly depend on the magnetic materials adopted. Besides these two technologies, resonant magnetic field sensors composed of silicon-based Micro-Electro-Mechanical System(MEMS) resonators have received extensive attention in recent years due to their benefits of small form factor, low power consumption, high performance and fabrication compatibility with CMOS technology. This paper reviews the latest developments of magnetic field sensors using silicon-based MEMS resonators. In addition, methods for improving the performance of such sensors are described. The current key challenges and future opportunities are provided.

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武颖杰,吕秀梅,张自强,涂程,张晓升.基于MEMS硅基谐振器的磁场传感器最新进展[J]. Journal of Terahertz Science and Electronic Information Technology ,2023,21(11):1387~1396

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History
  • Received:June 24,2022
  • Revised:December 27,2022
  • Adopted:
  • Online: November 28,2023
  • Published: