Swept-frequency continuous wave terahertz near-field imaging system
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1Ceyear Technologies Co.,Ltd,Qingdao Shandong 266555,China;2Science and Technology on Electronic Test and Measurement Laboratory,Qingdao Shandong 266555,China

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    Abstract:

    Limited by the diffraction limit, the theoretical limit of spatial imaging resolution for far-field terahertz imaging technology is half the wavelength, which fails to meet the testing requirements for the characterization of microscale information in materials. To address the application needs of micro-nano defect detection in new materials such as semiconductor materials and ordered structural materials, this paper designs a wide-bandwidth frequency-swept continuous-wave terahertz near-field imaging system. The system adopts an all-electronic integrated terahertz transceiver module, and through terahertz beam spatial synthesis, it achieves seamless coverage of the test frequency range from 0.11 to 1.10 THz with a frequency resolution of 1 Hz. Via multi-frequency point information fusion, micro-nano defect detection and identification in materials are realized, with a spatial imaging resolution of ≤100 nm, the imaging field of view reaches 100 μm×100 μm. Tests and characterizations on semiconductor materials and ordered structural materials verify that the system in this paper can obtain high-quality near-field images by selecting terahertz frequency points at which the test materials exhibit strong responses to the high-resolution frequency-swept continuous wave.

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LIANG Xiaolin, WANG Huimin, WANG Qi, SHI Xianbao, NIAN Fushun, YANG Jinpeng, JIANG Wanshun, DENG Jianqin, LU Botao. Swept-frequency continuous wave terahertz near-field imaging system[J]. Journal of Terahertz Science and Electronic Information,2026,24(2):196~[end].

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History
  • Received:August 12,2025
  • Revised:September 22,2025
  • Adopted:
  • Online: April 02,2026
  • Published: