Design of Symmetric Beam-Mass Structure in Micro Silicon Acceleration Sensor

Design of Symmetric Beam-Mass Structure in Micro Silicon Acceleration Sensor
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Finite element method (FEM) is applied to analyze the structure of symmetric beam-proof mass of micro silicon acceleration sensor in static field as well as dynamic filed. The regular effect patterns of the structures dimensions on its displacement, reson

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陈光焱苏伟何晓平.硅微加速度传感器的对称梁岛结构设计[J]. Journal of Terahertz Science and Electronic Information Technology ,2003,1(1):

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