Most of the vibrational or rotational energy levels of biological macromolecules and groups are in terahertz band, and their biological activities can only be shown in aqueous solution. The strong absorption of terahertz waves by water limits the popularization and application of terahertz technology. In order to study the dynamic characteristics of the reaction and change of biological samples in aqueous solution, terahertz technology and microfluidic technology are combined to study the size of microfluidic channels on microfluidic chips, the materials and fabrication process of microfluidic chips. Finally, the chip is tested by deionized water, which proves the feasibility of the terahertz microfluidic chip.